Ion Implanter Cleanroom
Project: Ion Implanter Cleanroom
Location: Chelmsford, UK
Type: Modular Hybrid Cleanroom
Cleanroom: ISO Class 5
NGS Cleanrooms have recently completed a complex cleanroom installation in Chelmsford for a leading global manufacturer of advanced imaging systems and components. The cleanroom was constructed around a new Varian Ion implanter and has 4 processing rooms including the main implanter loading room which is classified to ISO Class 5. This project utilises fan filter unit technology, precision cooling and tight tolerance RH control with toxic gas extraction and alarming, VESDA monitoring system and is integrated within the existing BMS system via a new Trend interface.